Thin film coatings for deep UV wavelengths are predominately produced by evaporation methods (thermal and Ebeam). Factors limiting the performance of evaporated films include surface roughness, ...

All the FIB related experiments were conducted using a FEI Helios450 dual-beam FIB/SEM. Figure 1c illustrates the two different FIB milling configurations discussed in this paper. The Ga ion beam was ...

Ion beam lithography is used to create fine nanostructures on a surface, such as circuit boards. It can be used to directly write on the material, rather than using a photomask, as in photolithography ...

It has been over 30 years since the first focused ion beam was used to make a TEM specimen. FEI, a company that is now part of Thermo Fisher Scientific, has been an essential part of helping take ion ...

Thin films play a crucial role in the fabrication of several components and devices, such as protective coatings, integrated circuits, solar cells, and optical ...

In spite of its superior chemical sensitivity, XPS depth profiling is rarely used because of the alteration introduced by the sputter removal process and the resulting inhomogeneous in-depth ...